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EP3257964

MANUFACTURING METHOD FOR DEPOSITION MASK, METAL SHEET USED FOR PRODUCING DEPOSITION MASK, AND MANUFACTURING METHOD FOR SAID METAL SHEET

Filed
Feb 5, 2016
Technology
Chemistry · Surface technology, coating +2
UPC cases
2
Ownership history
As recorded at the EPO. Transfers made after the opposition period are recorded in national registers and may be missing here.
Abstract

The present invention provides a metal sheet, on a first surface of which a resist pattern having a narrow width can be stably provided. This manufacturing method for a metal sheet includes a preparation step of preparing a sheet material comprising an iron alloy that contains nickel. When a composition analysis of the first surface of the metal sheet obtained from the sheet material is performed using X-ray photoelectron spectroscopy, the ratio A1/A2 obtained by the result of the X-ray photoelectron spectroscopy does not exceed 0.4, where A1 is the sum of the peak area value of nickel oxide and the peak area value of nickel hydroxide, and A2 is the sum of the peak area value of iron oxide and the peak area value of iron hydroxide.

Litigation history
DateCaseDivisionTypeOutcomeParties
Jul 29, 2025UPC CFI 1512/2025Mannheim LDCounterclaim for revocationLockedZapp AG +2

Additional proceedings on this patent

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