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EP2658123

ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME.

Filed
Dec 20, 2011
Technology
Electrical engineering · Semiconductors +1
UPC cases
2
Ownership history
As recorded at the EPO. Transfers made after the opposition period are recorded in national registers and may be missing here.
Abstract

[0001] Provided is an elastic wave device which can be used at high frequencies and in which the Q factor can be enhanced. An elastic wave device (1) includes a supporting substrate (2); a high-acoustic-velocity film (3) stacked on the supporting substrate (2), in which the acoustic velocity of a bulk wave propagating therein is higher than the acoustic velocity of an elastic wave propagating in a piezoelectric film (5); a low-acoustic-velocity film (4) stacked on the high-acoustic-velocity film (3), in which the acoustic velocity of a bulk wave propagating therein is lower than the acoustic velocity of a bulk wave propagating in the piezoelectric film (5); the piezoelectric film (5) stacked on the low-acoustic-velocity film (4); and an IDT electrode (6) stacked on a surface of the piezoelectric film (5).

Litigation history
DateCaseDivisionTypeOutcomeParties
Aug 14, 2026UPC CFI 2940/2026Munich LDCounterclaim for revocationLockedMaxscend Microelectronics Co., Ltd. +2

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