EP2658123
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME.
- Murata Manufacturing Co., Ltd.seit 27. Sept. 2013; EPA-Eintragungen enden 20. Dez. 2019
[0001] Provided is an elastic wave device which can be used at high frequencies and in which the Q factor can be enhanced. An elastic wave device (1) includes a supporting substrate (2); a high-acoustic-velocity film (3) stacked on the supporting substrate (2), in which the acoustic velocity of a bulk wave propagating therein is higher than the acoustic velocity of an elastic wave propagating in a piezoelectric film (5); a low-acoustic-velocity film (4) stacked on the high-acoustic-velocity film (3), in which the acoustic velocity of a bulk wave propagating therein is lower than the acoustic velocity of a bulk wave propagating in the piezoelectric film (5); the piezoelectric film (5) stacked on the low-acoustic-velocity film (4); and an IDT electrode (6) stacked on a surface of the piezoelectric film (5).
| Datum | Verfahren | Kammer | Art | Ergebnis | Parteien |
|---|---|---|---|---|---|
| 14. Aug. 2026 | UPC CFI 2940/2026 | Munich LD | Widerklage auf Nichtigkeit | Gesperrt | Maxscend Microelectronics Co., Ltd. +2 |
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